A Resonant Pressure Microsensor Capable of Self-Temperature Compensation

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

A Resonant Pressure Microsensor Capable of Self-Temperature Compensation

Resonant pressure microsensors are widely used in the fields of aerospace exploration and atmospheric pressure monitoring due to their advantages of quasi-digital output and long-term stability, which, however, requires the use of additional temperature sensors for temperature compensation. This paper presents a resonant pressure microsensor capable of self-temperature compensation without the ...

متن کامل

A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging

This paper presents the fabrication and characterization of a resonant pressure microsensor based on SOI-glass wafer-level vacuum packaging. The SOI-based pressure microsensor consists of a pressure-sensitive diaphragm at the handle layer and two lateral resonators (electrostatic excitation and capacitive detection) on the device layer as a differential setup. The resonators were vacuum package...

متن کامل

Performance characteristics of a pressure microsensor.

A new fiber optic microsensor has been developed for pressure measurement. The pressure microsensor is extremely small (360 micro m). Performance characteristics of the microsensor were evaluated over a pressure range from 0 to 250mmHg. Five sensors were compared to a National Institute of Standards and Technology traceable reference pressure. The microsensor had an accuracy, repeatability, and...

متن کامل

A High-Q Resonant Pressure Microsensor with Through-Glass Electrical Interconnections Based on Wafer-Level MEMS Vacuum Packaging

This paper presents a high-Q resonant pressure microsensor with through-glass electrical interconnections based on wafer-level MEMS vacuum packaging. An approach to maintaining high-vacuum conditions by integrating the MEMS fabrication process with getter material preparation is presented in this paper. In this device, the pressure under measurement causes a deflection of a pressure-sensitive s...

متن کامل

A Temperature Compensation Voltage Controlled Oscillator Using a Complementary to Absolute Temperature Voltage Reference

This paper presents a temperature compensation voltage controlled oscillator (VCO) based on Cross-Coupled pair and Colpitts structures which is suitable for military fields. Also, two inductors have been used for increasing the negative conductance. By using this method, start-up condition has been improved. Two varactors and a simple capacitor bank are applied for covering a wide tunning range...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Sensors

سال: 2015

ISSN: 1424-8220

DOI: 10.3390/s150510048